The demand for semiconductors is significantly increasing due to 5G, AI, autonomous driving, cloud services, IoT, EV vehicles, the metaverse, and other developments. At the same time, based on Moore's Law, semiconductor lithography has been achieving finer line widths and more precise processes, making the problems of particles and outgassing during the process more serious. In particular, cables used in ultra-high vacuum chambers such as EUV lithography systems and SEMs are subject to the most stringent demands for cleanliness (low particles and low outgassing), and at the same time, cables wired to the stage are required to additionally have high durability.
Junkosha provides super low outgassing cables(SLO) based on a consistent clean concept, from material selection to manufacturing, inspection, packaging, and shipping. We can customize the number of cores and shielding according to the environment of use and expected service life, and we can also offer round and flat cables suitable for every use.