Junkosha Flat and High-Flex Cable

Super Low Outgassing Cable (SLO) - Advanced Noise Resistance Solution

Precision Fine-Pitch Twisting for Resistance to External Noise

5G, AI, autonomous driving, IoT, EVs, and the metaverse are driving rapid growth in semiconductor demand. At the same time, advances in semiconductor performance and miniaturization are increasing the requirements for positioning accuracy in semiconductor manufacturing equipment. In particular, even minimal noise on low-current, high-speed transmission lines used for motion control and sensing can adversely affect equipment performance and processing accuracy, making stable signal transmission a critical issue.

Generally, noise countermeasures involve strengthening shielding. However, this approach can increase the cable's outer diameter and rigidity, leading to greater loads on moving parts and increased equipment vibration, which can in turn generate noise and reduce positioning accuracy. Furthermore, as equipment becomes smaller and more densely packed, the demand for space-saving designs and greater flexibility continues to grow.

At Junkosha, we have developed a proprietary technology for manufacturing twisted-pair signal lines that uniformly controls strand tension and length, helping to reduce timing deviations and variations in noise effects during signal transmission. This technology supports enhanced noise immunity while maintaining cable flexibility and ease of handling, contributing to high-precision positioning control and stable signal transmission.

Features

- Low Outgassing: The amount of outgassing is extremely small in ultra-high vacuum environments
- Noise Immunity: Helps reduce susceptibility to external noise
- High Durability: Proposals tailored to the required service life of moving applications

Use

- EUV lithography equipment, SEM, mask inspection equipment, and mask lithography equipment for semiconductor manufacturing
- Satellites and other space equipment

Comprehensive Technical Data Overview

Particle Emission Data

Particles/cftVelocity
0.5 m/s1.0 m/s2.0 m/s
0.1μm0.00.00.0
0.2μm0.00.00.0
0.3μm0.00.00.0
0.5μm0.00.00.0
1.0μm0.00.00.0
5.0μm0.00.00.0

Source: Adapted from Fraunhofer IPA evaluation data for a comparable product utilizing materials equivalent to those used in the evaluated construction.

Search for products that interest you